Ellipsometry of porousn-Si:(Ni, Co) structures

Spectroscopic ellipsometry of homoepitaxial diamond multilayers and delta-doped structures

Analysis of Reflectometry and Ellipsometry Data from Patterned Structures

Specular reflected light techniques, including both single wavelength and spectroscopic versions of ellipsometry and reflectometry, have been used for both etch and growth rate control. However, use of these techniques for process control on products has been limited due to the problems inherent in the analysis of refected light from patterned structures. In this paper, we examine techniques fo...

Investigation of SiC/Oxide Interface Structures by Spectroscopic Ellipsometry

We have investigated SiC/oxide interface structures by the use of spectroscopic ellipsometry. The depth profile of the optical constants of thermally grown oxide layers on SiC was obtained by observing the slope-shaped oxide layers, and the results suggest the existence of the interface layers, around 1 nm in thickness, having high refractive index than those of both SiC and SiO2. The wavelengt...

Application of spectroscopic ellipsometry and Mueller ellipsometry to optical characterization.

This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced tec...

investigating the feasibility of a proposed model for geometric design of deployable arch structures

deployable scissor type structures are composed of the so-called scissor-like elements (sles), which are connected to each other at an intermediate point through a pivotal connection and allow them to be folded into a compact bundle for storage or transport. several sles are connected to each other in order to form units with regular polygonal plan views. the sides and radii of the polygons are...